P-630 High Dynamics Piezo Nanopositioning System
1 Axis with Large Aperture
- Resonant frequency to 3.25 kHz
- Travel ranges to 80 µm
- Narrow and flat design
- Clear aperture with 30 mm diameter
Application fields
- Optical alignment
- Microscopy
- Biotechnology
- Photonics
- Fiber positioning
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
Maximum accuracy due to direct position measuring
Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.
Suitable for sophisticated vacuum applications
All components used in the piezo systems are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.
Specifications
Specifications
P-630.XCD | P-631.XCD | Unit | |
---|---|---|---|
Active axes | X | X | |
Motion and positioning | |||
Integrated sensor | Capacitive | Capacitive | |
Travel range at -20 to 120 V, open loop | 45 | 90 | µm |
Travel range, closed loop | 40 | 80 | µm |
Resolution, open loop | 0.1 | 0.1 | nm |
Resolution, closed loop | 0.2 | 0.2 | nm |
Linearity error, closed loop | 0.02 | 0.02 | % |
Repeatability over the entire travel range | ±2 | ±3 | nm |
Pitch / yaw | ±5 | ±5 | µrad |
Straightness / flatness | 50 | 50 | nm |
Mechanical properties | |||
Stiffness in motion direction | 5.5 | 5 | N / µm |
Resonant frequency, no load | 3250 | 2850 | Hz |
Resonant frequency, under load, 60 g | 1600 | 1200 | Hz |
Push / pull force capacity in motion direction | 10 | 10 | N |
Load capacity | 10 | 10 | N |
Drive properties | |||
Piezo ceramic | PICMA® P-887 | PICMA® P-885; P-887 | |
Electrical capacitance | 6.4 | 12.6 | µF |
Miscellaneous | |||
Operating temperature range | 0 to 40 | 0 to 40 | °C |
Material | Aluminum | Aluminum | |
Dimensions | 102 mm × 50 mm × 18 mm | 102 mm × 50 mm × 18 mm | |
Mass | 300 | 320 | g |
Cable length | 1.5 | 1.5 | m |
Sensor / voltage connection | D-sub 7W2 (m) | D-sub 7W2 (m) | |
Recommended electronics | E-709, E-709.CHG, E-754 | E-709, E-709.CHG, E-754 |
Downloads
Product Note
Product Change Notification Piezo Actuator Driven Products
Datasheet
Documentation
User Manual PZ247
P-630, P-631 Piezo Nanopositioning Systems with Aperture and Capacitive Sensor
3-D Models
3-D-model P-630.XCD
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Technology

PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.

Vacuum
Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.

Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.

Digital Motion Controllers
Digital technology opens up possibilities for improving performance in control engineering which do not exist with conventional analog technology.

Capacitive Sensors
Capacitive sensors are the metrology system of choice for the most demanding nanopositioning applications.