P-621.1U • P-625.1U PIHera Linear Precision Positioner

Vacuum Compatible and with Variable Travel Ranges and Axis Configuration

  • Travel ranges 100 to 500 µm (600 µm open loop)
  • Resolution to 0.2 nm
  • Linearity error ≤0.03 %
  • XY combination possible
  • UHV compatible to 10-9 hPa
P-621.1U • P-625.1U PIHera Linear Precision Positioner
Product Description Specifications Downloads Quote / Order

Application fields

  • Interferometry
  • Microscopy
  • Nanopositioning
  • Biotechnology
  • Test applications
  • Semiconductor technology
  • Photonics
  • Fiber positioning

Suitable for sophisticated vacuum applications

All components used in the piezo systems are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

Outstanding lifetime due to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

Specifications

Datasheet

Datasheet P-621.1U • P-625.1U

Version / Date
2022-02-14
pdf - 558 KB
Version / Date
2022-02-14
pdf - 561 KB

Downloads

Datasheet

Datasheet

Datasheet P-621.1U • P-625.1U

Version / Date
2022-02-14
pdf - 558 KB
Version / Date
2022-02-14
pdf - 561 KB

Documentation

Documentation

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors

Version / Date
1.3.0 2021-11-03
pdf - 3 MB
Version / Date
1.3.0 2021-11-03
pdf - 3 MB

3-D Models

3-D Models

P-62x.1 STEP

Version / Date
---
zip - 954 KB

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