V-522.1AA
PIMag® Voice coil linear stage, direct drive, velocity 250 mm/s, 5 mm travel range, direct position measuring with incremental encoder, cable exit in direction of motion
V-522 • V-524 • V-528 High-Dynamics PIMag® Linear Stage
Voice Coil Direct Drive with Direct Position Measuring
- Fast scanning and positioning
- Travel ranges 5 mm, 10 mm, 20 mm
- Scanning frequencies of more than 10 Hz
- Max. velocity 250 mm/s
- Crossed roller bearings for the highest precision
- PIMag® voice coil motor developed by PI
V-524.1AA
V-52x, dimensions in mm
The V-522 reliably performs 20-nm repeatable steps.
Multi-axis setup with two V-528 PIMag® voice coil linear stages.
V-522, V-524, and V-528 PIMag® voice coil linear stages
V-522 • V-524 • V-528 High-Dynamics PIMag® Linear Stage
Product Description
Specifications
Downloads
Quote / Order
Reference-class linear positioner
Linear stages with magnetic direct drives largely dispense with mechanical components in the drivetrain and the drive force acts directly on the motion platform. Together with precision bearings, a high travel accuracy and longer lifetime is achieved. The linear stages are particularly suitable for scanning applications.
PIMag® voice coil motor
Voice coil motors are direct drives. In direct drives, the force of the drive element is transmitted directly to the load to be moved without the use of mechanical transmission elements such as coupling, drive screw, or gearhead. Voice coil drives consist of a permanent magnet and a winding body that are located in the air gap of the magnetic field. When current flows through the winding body, it moves in the magnetic field of the permanent magnet. Thanks to their low weight and friction-free drive principle, voice coil drives are particularly suitable for applications that require high dynamics and high velocities at limited travel ranges. High scan frequencies and precision positioning are also possible with these drives, because they are free of the effects of hysteresis.
PIMag®
PI develops proprietary magnetic motors if positioning systems need to achieve specific performance characteristics that cannot be reached by using drive components currently available on the market, for example, to achieve a high force density or a compact design. The motors developed by PI are identified by the PIMag® brand name.
Crossed roller guide
With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.
Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Application fields
Industry and research. Metrology. Photonics and precision scanning in semiconductor or flat panel display manufacturing.
Specifications
Specifications
Motion and positioning | V-522.1AA V-522.1AB | V-524.1AA V-524.1AB | V-528.1AA V-528.1AB | Unit | Tolerance |
|---|---|---|---|---|---|
Active axes | X | ||||
Travel range | 5 | 10 | 20 | mm | |
Integrated sensor | Optical, incremental | Optical, incremental | Optical, incremental | ||
Sensor resolution* | 10 | 10 | 10 | nm | |
Minimum incremental motion | 20 | 20 | 20 | nm | typ. |
Unidirectional repeatability | 20 | 20 | 20 | nm | |
Bidirectional repeatability | ±120 | ±120 | ±120 | nm | typ. |
Reference switch repeatability | <1 | <1 | <1 | µm | |
Pitch | ±50 | ±100 | ±200 | µrad | max. |
Yaw | ±50 | ±100 | ±200 | µrad | max. |
Straightness | 0.5 | 1 | 2.5 | µm | max. |
Flatness | 0.5 | 0.5 | 1 | µm | max. |
Velocity | 250 | 250 | 250 | mm/s | max. |
Drive properties | V-522.1AA V-522.1AB | V-524.1AA V-524.1AB | V-528.1AA V-528.1AB | Unit | Tolerance |
|---|---|---|---|---|---|
Drive type | Voice coil | Voice coil | Voice coil | ||
Nominal force | 3.4 | 2.8 | 2.3 | N | nominal |
Nominal current | 1.0 | 1.0 | 1.0 | A | nominal |
Peak current | 3 | 3 | 3 | A | max. (3s) |
Force constant | 3.4 | 2.9 | 2.3 | N/A | typ. |
Motor constant | 1.3 | 1.1 | 0.85 | N/(√W) | typ. |
Coil resistance | 7.2 | 7.2 | 7.2 | Ω | typ. |
Coil inductance | 1.7 | 1.7 | 1.7 | mH | typ. |
Time constant | 0.32 | 0.32 | 0.32 | ms | |
Permitted temperature for positioner components | 75 | 75 | 75 | °C | max. |
Miscellaneous | V-52x.1AA, V-52x.1AB | Unit | Tolerance |
|---|---|---|---|
Housing material | AL | ||
Cable length | 2 | m | ±10 mm |
Cable exit | V-52x.1AA: Cable exit in X | ||
Power / sensor connector | D-sub 15-pin (m) | ||
Lifetime | 20000 | km | |
Operating temperature range | 18 to 45 | °C | |
Relative humidity during operation | 20 to 80 | % | |
Recommended controllers | C-413.2G(A), C-413.20(A) |
*With C-413 controller
The specifications apply to room temperature (22 °C ±3 °C), specifications may deviate outside of this range.
Downloads
Product Note
Product Note
Product Change Notification V-524, V-528
Version / Date
2020-01-20
pdf - 50 KB
English
Datasheet
Documentation
Documentation
User Manual V522T0002
V-522 / V-524 / V-528 PIMag® Voice Coil Linear Stages for 5 mm / 10 mm / 20 mm Travel Range
Version / Date
2021-11-05
pdf - 3 MB
English
3-D Models
3-D Models
V-52x 3-D model
zip - 3 MB
Animated 3-D Models
Animated 3-D Models
Animated 3-D Model V-522.1AB
zip - 253 KB
Animated 3-D Models
Animated 3-D Model V-522.1AA
zip - 254 KB
Animated 3-D Models
Animated 3-D Model V-524.1AA
zip - 260 KB
Animated 3-D Models
Animated 3-D Model V-524.1AB
zip - 257 KB
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
V-522.1AB
PIMag® Voice coil linear stage, direct drive, velocity 250 mm/s, 5 mm travel range, direct position measuring with incremental encoder, cable exit orthogonal to direction of motion
V-524.1AA
PIMag® Voice coil linear stage, direct drive, velocity 250 mm/s, 10 mm travel range, direct position measuring with incremental encoder, cable exit in direction of motion
V-524.1AB
PIMag® Voice coil linear stage, direct drive, velocity 250 mm/s, 10 mm travel range, direct position measuring with incremental encoder, cable exit orthogonal to direction of motion
V-528.1AA
PIMag® Voice coil linear stage, direct drive, velocity 250 mm/s, 20 mm travel range, direct position measuring with incremental encoder, cable exit in direction of motion
V-528.1AB
PIMag® Voice coil linear stage, direct drive, velocity 250 mm/s, 20 mm travel range, direct position measuring with incremental encoder, cable exit orthogonal to direction of motion
