V-522 • V-524 • V-528 High-Dynamics PIMag® Linear Stage

Voice Coil Direct Drive with Direct Position Measuring

V-522 • V-524 • V-528 High-Dynamics PIMag® Linear Stage

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The V-522 reliably performs 20-nm repeatable steps.

Multi-axis setup with two V-528 PIMag® voice coil linear stages.

V-522, V-524, and V-528 PIMag® voice coil linear stages

Fast scanning and positioning
Travel ranges 5 mm, 10 mm, 20 mm
Scanning frequencies of more than 10 Hz
Max. velocity 250 mm/s
Crossed roller bearings for the highest precision
PIMag® voice coil motor developed by PI

Linear stages with magnetic direct drives largely dispense with mechanical components in the drivetrain and the drive force acts directly on the motion platform. Together with precision bearings, a high travel accuracy and longer lifetime is achieved. The linear stages are particularly suitable for scanning applications.

Voice coil motors are direct drives. In direct drives, the force of the drive element is transmitted directly to the load to be moved without the use of mechanical transmission elements such as coupling, drive screw, or gearhead. Voice coil drives consist of a permanent magnet and a winding body that are located in the air gap of the magnetic field. When current flows through the winding body, it moves in the magnetic field of the permanent magnet. Thanks to their low weight and friction-free drive principle, voice coil drives are particularly suitable for applications that require high dynamics and high velocities at limited travel ranges. High scan frequencies and precision positioning are also possible with these drives, because they are free of the effects of hysteresis.

PI develops proprietary magnetic motors if positioning systems need to achieve specific performance characteristics that cannot be reached by using drive components currently available on the market, for example, to achieve a high force density or a compact design. The motors developed by PI are identified by the PIMag® brand name.

With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Industry and research. Metrology. Photonics and precision scanning in semiconductor or flat panel display manufacturing.

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Datasheet

Datasheet V-522 • V-524 • V-528

Version / Date

2020-05-26

Version / Date

2020-05-26

Version / Date

2021-01-14

Document language

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pdf - 2 MB

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pdf - 2 MB

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pdf - 807 KB

Motion and positioning	V-522.1AA V-522.1AB	V-524.1AA V-524.1AB	V-528.1AA V-528.1AB	Unit	Tolerance
Active axes	X
Travel range	5	10	20	mm
Integrated sensor	Optical, incremental	Optical, incremental	Optical, incremental
Sensor resolution*	10	10	10	nm
Minimum incremental motion	20	20	20	nm	typ.
Unidirectional repeatability	20	20	20	nm
Bidirectional repeatability	±120	±120	±120	nm	typ.
Reference switch repeatability	<1	<1	<1	µm
Pitch	±50	±100	±200	µrad	max.
Yaw	±50	±100	±200	µrad	max.
Straightness	0.5	1	2.5	µm	max.
Flatness	0.5	0.5	1	µm	max.
Velocity	250	250	250	mm/s	max.

Mechanical properties	V-522.1AA V-522.1AB	V-524.1AA V-524.1AB	V-528.1AA V-528.1AB	Unit	Tolerance
Load capacity in Z	100	100	100	N	max.
Moved mass	131	137	150	g
Overall mass	460	500	580	g

Drive properties	V-522.1AA V-522.1AB	V-524.1AA V-524.1AB	V-528.1AA V-528.1AB	Unit	Tolerance
Drive type	Voice coil	Voice coil	Voice coil
Nominal force	3.4	2.8	2.3	N	nominal
Nominal current	1.0	1.0	1.0	A	nominal
Peak current	3	3	3	A	max. (3s)
Force constant	3.4	2.9	2.3	N/A	typ.
Motor constant	1.3	1.1	0.85	N/(√W)	typ.
Coil resistance	7.2	7.2	7.2	Ω	typ.
Coil inductance	1.7	1.7	1.7	mH	typ.
Time constant	0.32	0.32	0.32	ms
Permitted temperature for positioner components	75	75	75	°C	max.

Miscellaneous	V-52x.1AA, V-52x.1AB	Unit	Tolerance
Housing material	AL
Cable length	2	m	±10 mm
Cable exit	V-52x.1AA: Cable exit in X V-52x.1AB: Cable exit in Y
Power / sensor connector	D-sub 15-pin (m)
Lifetime	20000	km
Operating temperature range	18 to 45	°C
Relative humidity during operation	20 to 80	%
Recommended controllers	C-413.2G(A), C-413.20(A)

*With C-413 controller

The specifications apply to room temperature (22 °C ±3 °C), specifications may deviate outside of this range.

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Product Note

Product Change Notification V-524, V-528

Version / Date

2020-01-20

Document language English

Download

pdf - 50 KB

Datasheet

Datasheet V-522 • V-524 • V-528

Version / Date

2020-05-26

Version / Date

2020-05-26

Version / Date

2021-01-14

Document language

Download

pdf - 2 MB

Download

pdf - 2 MB

Download

pdf - 807 KB

Documentation

Short Instructions MP163EK

Positioners with Magnetic Linear Motor: V-308 / V-408 / V-508 / V-52x / V-551 / V-610 / V-73x / V-741

Version / Date

4.0.0 12/2020

Version / Date

4.0.0 12/2020

Document language

Download

pdf - 829 KB

Download

pdf - 858 KB

Documentation

User Manual V522T0002

V-522 / V-524 / V-528 PIMag® Voice Coil Linear Stages for 5 mm / 10 mm / 20 mm Travel Range

Version / Date

2020-08-28

Document language English

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3-D Models

V-52x 3-D model

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Animated 3-D Models

Animated 3-D Model V-522.1AB

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Animated 3-D Models

Animated 3-D Model V-522.1AA

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Animated 3-D Models

Animated 3-D Model V-524.1AA

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Animated 3-D Models

Animated 3-D Model V-524.1AB

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V-522.1AA

PIMag® Voice coil linear stage, direct drive, velocity 250 mm/s, 5 mm travel range, direct position measuring with incremental encoder, cable exit in direction of motion

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V-522.1AB

PIMag® Voice coil linear stage, direct drive, velocity 250 mm/s, 5 mm travel range, direct position measuring with incremental encoder, cable exit orthogonal to direction of motion

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V-524.1AA

PIMag® Voice coil linear stage, direct drive, velocity 250 mm/s, 10 mm travel range, direct position measuring with incremental encoder, cable exit in direction of motion

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V-524.1AB

PIMag® Voice coil linear stage, direct drive, velocity 250 mm/s, 10 mm travel range, direct position measuring with incremental encoder, cable exit orthogonal to direction of motion

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V-528.1AA

PIMag® Voice coil linear stage, direct drive, velocity 250 mm/s, 20 mm travel range, direct position measuring with incremental encoder, cable exit in direction of motion

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V-528.1AB

PIMag® Voice coil linear stage, direct drive, velocity 250 mm/s, 20 mm travel range, direct position measuring with incremental encoder, cable exit orthogonal to direction of motion

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