- Travel range 100 µm
- Direct position measuring with capacitive sensors
- Resolution to 0.3 nm, closed loop
- Clear aperture 50 mm × 50 mm
- Other versions available with additional degrees of freedom
- XY and XYZ versions available
- Vacuum-compatible versions on request
- Scanning microscopy
- Confocal microscopy
- Mask/wafer positioning
- Surface measuring technology
- Image processing / stabilization
- Nanopositioning with high flatness and straightness of motion
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
Maximum accuracy due to direct position measuring
Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.
Short Instructions PZ240
Piezo Positioning Systems: P-5xx / P-6xx / P-7xx
User Manual PZ103
P-733, P-734 Piezo Nanopositioning Systems with Capacitive Sensors
P-733.Z 3-D model
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