M-511 • M-521 • M-531 High-Precision Linear Stage

Travel range

M-511: 102 (4‘‘)

M-521: 204 (8‘‘)

M-531: 306 (12‘‘)

M-511: 102 (4‘‘)

M-521: 204 (8‘‘)

M-531: 306 (12‘‘)

M-511: 102 (4‘‘)

M-521: 204 (8‘‘)

M-531: 306 (12‘‘)

mm

Integrated sensor

Linear encoder

Rotary encoder

Rotary encoder

Sensor resolution linear encoder

0.05

µm

Sensor resolution rotary encoder

–

4096

2048

Cts./rev.

Design resolution

0.05

0.488

0.033

µm

Typ.

Minimum incremental motion

0.1

0.5

0.4

µm

Typ.

Unidirectional repeatability

0.1

0.5

0.4

µm

Typ.

Bidirectional repeatability

±0.2

–

–

µm

Typ.

Backlash

–

1

1

µm

Typ.

Pitch / yaw per 100 mm

±35

±35

±35

µrad

Typ.

Straightness / flatness per 100 mm

1

1

1

µm

Velocity

50

100

6

mm/s

Max.

Drive screw pitch of ball screw

2

2

2

mm

Gear ratio

–

–

(28/12)⁴ ~ 29.6:1

Load capacity

1000

1000

1000

N

Max.

Push/pull force

80

80

80

N

Max.

Permissible lateral force

200

200

200

N

Max.

Motor type

DC motor with PWM control

DC motor with PWM control*

DC gear motor

Motor resolution

–

–

–

Steps/rev.

Guide

Recirculating ball bearing guide

Recirculating ball bearing guide

Recirculating ball bearing guide

Operating voltage

24

24

M-5x1.DG1: 0 to ±12

M-5x1.PG1: 24

V

Motor power

30

60

3

W

Nom.

Torque

80

70

5

mNm

Nom.

Reference and limit switches

Hall effect

Hall effect

Hall effect

Operating temperature range

10 to 50

-20 to 65

-20 to 65

°C

Material

Aluminum, black anodized

Mass

M-511: 5

M-521: 6.1

M-531: 7.2

M-511: 5

M-521: 6.1

M-531: 7.2

M-511: 5

M-521: 6.1

M-531: 7.2

kg

±5 %

Connector

D-sub 15 (m)

D-sub 15 (m)

D-sub 15 (m)

Recommended controllers

C-863

C-884

C-863

C-884

C-863

C-884