M-511 • M-521 • M-531 High-Precision Linear Stage

High Travel Accuracy, Long Travel Ranges, Many Motor Variants

Travel ranges 102, 204, and 306 mm (4”, 8”, 12”)
Max. velocity to 100 mm/s
Encoder resolution 50 nm
Load capacity to 100 kg
Zero-play ball screw
XY and XYZ combinations

M-511

High travel accuracy and load capacity due to precision linear guides with preloaded recirculating ball bearings. Backlash-compensated ball screw with 2 mm pitch. Stress-relieved aluminum base for highest stability.

XY and XYZ combinations possible with M-501 precision Z stages.

M-5x1.DD1: DC motor with integrated ActiveDrive amplifiers for high velocity combined with direct-measuring linear encoder for high resolution and repeatability. M-5x1.DD2 also with integrated holding brake.
M-5x1.DG1: DC gear motor with direct control and rotary encoder.
M-5x1.PG1: DC gear motor with integrated ActiveDrive amplifier and rotary encoder.
M-5x1.PD1: DC motor with integrated amplifier and rotary encoder.
M-5x1.EC: Brushless DC motor with integrated block commutation and rotary encoder.

Noncontact limit switches. Noncontact reference switch in the middle of the travel range.

Industry and research. Laser materials processing, surface inspection.

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Datasheet

Version / Date

2020-06-29

pdf - 556 KB

Version / Date

2020-06-29

pdf - 559 KB

Version / Date

2018-01-15

pdf - 739 KB

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Motion and positioning	M-5x1.DD1 M-5x1.DD2	M-5x1.EC M-5x1.PD1	M-5x1.DG1 M-5x1.PG1	Unit	Tolerance
Travel range	M-511: 102 (4‘‘) M-521: 204 (8‘‘) M-531: 306 (12‘‘)	M-511: 102 (4‘‘) M-521: 204 (8‘‘) M-531: 306 (12‘‘)	M-511: 102 (4‘‘) M-521: 204 (8‘‘) M-531: 306 (12‘‘)	mm
Integrated sensor	Linear encoder	Rotary encoder	Rotary encoder
Sensor resolution linear encoder	0.05			µm
Sensor resolution rotary encoder	–	4096	2048	Cts./rev.
Design resolution	0.05	0.488	0.033	µm	Typ.
Minimum incremental motion	0.1	0.5	0.4	µm	Typ.
Unidirectional repeatability	0.1	0.5	0.4	µm	Typ.
Bidirectional repeatability	±0.2	–	–	µm	Typ.
Backlash	–	1	1	µm	Typ.
Pitch / yaw per 100 mm	±35	±35	±35	µrad	Typ.
Straightness / flatness per 100 mm	1	1	1	µm
Velocity	50	100	6	mm/s	Max.

Mechanical properties	M-5x1.DD1 M-5x1.DD2	M-5x1.EC M-5x1.PD1	M-5x1.DG1 M-5x1.PG1	Unit	Tolerance
Drive screw pitch of ball screw	2	2	2	mm
Gear ratio	–	–	(28/12)⁴ ~ 29.6:1
Load capacity	1000	1000	1000	N	Max.
Push/pull force	80	80	80	N	Max.
Permissible lateral force	200	200	200	N	Max.

Drive properties	M-5x1.DD1 M-5x1.DD2	M-5x1.EC M-5x1.PD1	M-5x1.DG1 M-5x1.PG1	Unit	Tolerance
Motor type	DC motor with PWM control	DC motor with PWM control*	DC gear motor
Motor resolution	–	–	–	Steps/rev.
Guide	Recirculating ball bearing guide	Recirculating ball bearing guide	Recirculating ball bearing guide
Operating voltage	24	24	M-5x1.DG1: 0 to ±12 M-5x1.PG1: 24	V
Motor power	30	60	3	W	Nom.
Torque	80	70	5	mNm	Nom.
Reference and limit switches	Hall effect	Hall effect	Hall effect

Miscellaneous	M-5x1.DD1 M-5x1.DD2	M-5x1.EC M-5x1.PD1	M-5x1.DG1 M-5x1.PG1	Unit	Tolerance
Operating temperature range	10 to 50	-20 to 65	-20 to 65	°C
Material	Aluminum, black anodized
Mass	M-511: 5 M-521: 6.1 M-531: 7.2	M-511: 5 M-521: 6.1 M-531: 7.2	M-511: 5 M-521: 6.1 M-531: 7.2	kg	±5 %
Connector	D-sub 15 (m)	D-sub 15 (m)	D-sub 15 (m)
Recommended controllers	C-863 C-884	C-863 C-884	C-863 C-884

* M-5xx.EC: Brushless DC motor with integrated block commutation (PWM control).

Connecting cables are not in the scope of delivery and must be ordered separately.

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Product Note

M-313.80, M-331.1MS, M-332.5MS, M-333.1MS, M-333.2MS, M-403.1VG, M-403.1VP, M-403.2VG, M-403.2VP, M-403.4VG, M-403.4VP, M-403.6VG, M-403.6VP, M-403.8VG, M-403.8VP, M-413.1VG, M-413.1VP, M-413.2VG, M-413.2VP, M-413.3VG, M-413.3VP, M-414.1VG, M-414.1VP, M-414.2VG, M-414.2VP, M-414.3VG, M-414.3VP, M-414.500, M-451.01, M-451.12S, M-451.1DG, M-451.1PD, M-500.18V, M-500.90, M-505.4DG, M-511.2S1, M-521.2S1, M-531.2S1, M-605.11, M-619.00, M-620.00, M-621.00, M-622.00, M-623.00, M-624.10, M-642.00, M-653.00, M-655.00

Version / Date

2019-08-13

pdf - 381 KB

English

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Datasheet

Version / Date

2020-06-29

pdf - 556 KB

Version / Date

2020-06-29

pdf - 559 KB

Version / Date

2018-01-15

pdf - 739 KB

Download

Documentation

Positioners with Electric Motors: M-06x, M-11x, M-12x, M-4xx, M-5xx

Version / Date

3.2.0 01/2021

pdf - 1 MB

Version / Date

3.2.0 01/2021

pdf - 1 MB

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Documentation

M-511, M-521, M-531 Micropositioning Stages

Version / Date

1.2 2021-10-04

pdf - 2 MB

Version / Date

1.2 2021-10-04

pdf - 2 MB

Documentation

Overview of all possible combinations of PI linear, rotary and tilt stages

Version / Date

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pdf - 760 KB

Version / Date

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pdf - 763 KB

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3-D Models

zip - 4 MB

3-D Models

zip - 3 MB

3-D Models

zip - 4 MB

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Separate connection cable required for motor and sensor connection respectively.

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

M-511.DD1

Microtranslation stage, 102 mm travel range, ActiveDrive DC motor, linear encoder

Reference-class linear stage

Drive types and position measurement

Application fields

Specifications

Datasheet M-511 • M-521 • M-531

Specifications

Downloads

Product Note

Product Change Notification M-Portfolio-Streamlining Part-3

Datasheet

Datasheet M-511 • M-521 • M-531

Documentation

Short Instructions MP119EK

User Manual MP113

PI Mounting Adapters for Micropositioning

3-D Models

M-511 3-D model

M-521 3-D model

M-531 3-D model

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Stages with 102 mm travel range

Stages with 204 mm travel range

Stages with 306 mm travel range

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