M-511.DD1
High-precision linear stage; DC motor with ActiveDrive; 102 mm travel range; 1000 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 50 nm sensor resolution, A/B quadrature, RS-422
M-511 • M-521 • M-531 High-Precision Linear Stage
High Travel Accuracy, Long Travel Ranges, Many Motor Variants
- Travel ranges: 102, 204 und 306 mm (4", 8", 12")
- Max. velocity to 100 mm/s
- Encoder resolution 50 nm
- Load capacity to 100 kg
- Zero-play ball screw
- XY and XYZ combinations
M-511
M-511, M-521, M-531, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
M-511 • M-521 • M-531 High-Precision Linear Stage
Product Description
Specifications
Downloads
Quote / Order
Reference-class linear stage
High travel accuracy and load capacity due to precision linear guides with preloaded recirculating ball bearings. Backlash-compensated ball screw with 2 mm pitch. Stress-relieved aluminum base for high stability.
XY and XYZ combinations with M-501 precision Z stages possible.
Drive types and position measurement
- M-5x1.DDx: DC motor with integrated ActiveDrive amplifiers for high velocity combined with direct-measuring linear encoder for high resolution and repeatability. M-5x1.DD2 also with integrated holding brake.
- M-5x1.DG1: DC gear motor with direct control and rotary encoder.
- M-5x1.PG1: DC gear motor with integrated ActiveDrive amplifier and rotary encoder.
- M-5x1.PD1: DC motor with integrated amplifier and rotary encoder.
- M-5x1.EC: Brushless DC motor with integrated block commutation and rotary encoder.
Noncontact limit switches. Noncontact reference switch in the middle of the travel range.
Application fields
Industry and research. Laser materials processing, surface inspection.
Specifications
Specifications
Click inside the table and use your arrow keys to scroll left or right.
| Motion | M-511.DD1 | M-511.DD2 | M-511.DG1 | M-511.EC | M-511.PD1 | M-511.PG1 | M-521.DD1 | M-521.DD2 | M-521.DG1 | M-521.EC | M-521.PD1 | M-521.PG1 | M-531.DD1 | M-531.DD2 | M-531.DG1 | M-531.EC | M-531.PD1 | M-531.PG1 | Tolerance |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Active axes | X | X | X | X | X | X | X | X | X | X | X | X | X | X | X | X | X | X | |
| Travel range in X | 102 mm | 102 mm | 102 mm | 102 mm | 102 mm | 102 mm | 204 mm | 204 mm | 204 mm | 204 mm | 204 mm | 204 mm | 306 mm | 306 mm | 306 mm | 306 mm | 306 mm | 306 mm | |
| Maximum velocity in X, unloaded | 50 mm/s | 50 mm/s | 6 mm/s | 100 mm/s | 100 mm/s | 6 mm/s | 50 mm/s | 50 mm/s | 6 mm/s | 100 mm/s | 100 mm/s | 6 mm/s | 50 mm/s | 50 mm/s | 6 mm/s | 100 mm/s | 100 mm/s | 6 mm/s | |
| Straightness (Linear crosstalk in Y with motion in X) | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | typ. |
| Flatness (Linear crosstalk in Z with motion in X) | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | typ. |
| Pitch (Rotational crosstalk in θY with motion in X) | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | typ. |
| Yaw (Rotational crosstalk in θZ with motion in X) | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | ± 35 µrad | typ. |
| Positioning | M-511.DD1 | M-511.DD2 | M-511.DG1 | M-511.EC | M-511.PD1 | M-511.PG1 | M-521.DD1 | M-521.DD2 | M-521.DG1 | M-521.EC | M-521.PD1 | M-521.PG1 | M-531.DD1 | M-531.DD2 | M-531.DG1 | M-531.EC | M-531.PD1 | M-531.PG1 | Tolerance |
| Integrated sensor | Incremental linear encoder | Incremental linear encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental linear encoder | Incremental linear encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental linear encoder | Incremental linear encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | |
| Unidirectional repeatability in X | 0.1 µm | 0.1 µm | 0.4 µm | 0.5 µm | 0.5 µm | 0.4 µm | 0.1 µm | 0.1 µm | 0.4 µm | 0.5 µm | 0.5 µm | 0.4 µm | 0.1 µm | 0.1 µm | 0.4 µm | 0.5 µm | 0.5 µm | 0.4 µm | typ. |
| Bidirectional repeatability in X | ± 0.2 µm | ± 0.2 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 0.2 µm | ± 0.2 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 0.2 µm | ± 0.2 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | typ. |
| Minimum incremental motion in X | 0.1 µm | 0.1 µm | 0.4 µm | 0.5 µm | 0.5 µm | 0.4 µm | 0.1 µm | 0.1 µm | 0.4 µm | 0.5 µm | 0.5 µm | 0.4 µm | 0.1 µm | 0.1 µm | 0.4 µm | 0.5 µm | 0.5 µm | 0.4 µm | typ. |
| Sensor signal | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | |
| Sensor resolution | 50 nm | 50 nm | 50 nm | 50 nm | 50 nm | 50 nm | |||||||||||||
| Reference switch | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | |
| Limit switches | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | |
| Backlash in X | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | typ. | ||||||
| Sensor resolution | 2048 Cts./rev. | 4096 Cts./rev. | 4096 Cts./rev. | 2048 Cts./rev. | 2048 Cts./rev. | 4096 Cts./rev. | 4096 Cts./rev. | 2048 Cts./rev. | 2048 Cts./rev. | 4096 Cts./rev. | 4096 Cts./rev. | 2048 Cts./rev. | |||||||
| Drive Properties | M-511.DD1 | M-511.DD2 | M-511.DG1 | M-511.EC | M-511.PD1 | M-511.PG1 | M-521.DD1 | M-521.DD2 | M-521.DG1 | M-521.EC | M-521.PD1 | M-521.PG1 | M-531.DD1 | M-531.DD2 | M-531.DG1 | M-531.EC | M-531.PD1 | M-531.PG1 | Tolerance |
| Drive type | DC motor with ActiveDrive | DC motor with ActiveDrive | DC gear motor | Brushless DC motor | DC motor with ActiveDrive | DC gear motor with ActiveDrive | DC motor with ActiveDrive | DC motor with ActiveDrive | DC gear motor | Brushless DC motor | DC motor with ActiveDrive | DC gear motor with ActiveDrive | DC motor with ActiveDrive | DC motor with ActiveDrive | DC gear motor | Brushless DC motor | DC motor with ActiveDrive | DC gear motor with ActiveDrive | |
| Nominal voltage | 24 V | 24 V | 24 V | 24 V | 24 V | 24 V | 24 V | 24 V | 24 V | 24 V | 24 V | 24 V | 24 V | 24 V | 24 V | ||||
| Drive force in negative direction of motion in X | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | typ. |
| Drive force in positive direction of motion in X | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | 80 N | typ. |
| Peak voltage | 12 V | 12 V | 12 V | ||||||||||||||||
| Mechanical Properties | M-511.DD1 | M-511.DD2 | M-511.DG1 | M-511.EC | M-511.PD1 | M-511.PG1 | M-521.DD1 | M-521.DD2 | M-521.DG1 | M-521.EC | M-521.PD1 | M-521.PG1 | M-531.DD1 | M-531.DD2 | M-531.DG1 | M-531.EC | M-531.PD1 | M-531.PG1 | Tolerance |
| Guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | |
| Drive screw type | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | |
| Drive screw pitch | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | |
| Moved mass in X, unloaded | 530 g | 530 g | 530 g | 530 g | 530 g | 530 g | 530 g | 530 g | 530 g | 530 g | 530 g | 530 g | 530 g | 530 g | 530 g | 530 g | 530 g | 530 g | |
| Permissible push force in Y | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | max. |
| Permissible push force in Z | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | max. |
| Permissible torque in θx | 40 N·m | 40 N·m | 40 N·m | 40 N·m | 40 N·m | 40 N·m | 40 N·m | 40 N·m | 40 N·m | 40 N·m | 40 N·m | 40 N·m | 40 N·m | 40 N·m | 40 N·m | 40 N·m | 40 N·m | 40 N·m | max. |
| Permissible torque in θY | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | max. |
| Permissible torque in θZ | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | 20 N·m | max. |
| Overall mass | 5000 g | 5000 g | 5000 g | 5000 g | 5000 g | 5000 g | 6100 g | 6100 g | 6100 g | 6100 g | 6100 g | 6100 g | 7200 g | 7200 g | 7200 g | 7200 g | 7200 g | 7200 g | |
| Material | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | Black anodized aluminum | |
| Holding brake | Electromagnetic safety brake | Electromagnetic safety brake | Electromagnetic safety brake | ||||||||||||||||
| Gear ratio i | 29,6 : 1 | 29,6 : 1 | 29,6 : 1 | 29,6 : 1 | 29,6 : 1 | 29,6 : 1 | |||||||||||||
| Miscellaneous | M-511.DD1 | M-511.DD2 | M-511.DG1 | M-511.EC | M-511.PD1 | M-511.PG1 | M-521.DD1 | M-521.DD2 | M-521.DG1 | M-521.EC | M-521.PD1 | M-521.PG1 | M-531.DD1 | M-531.DD2 | M-531.DG1 | M-531.EC | M-531.PD1 | M-531.PG1 | Tolerance |
| Connector | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | |
| Connector for supply voltage | M8 4-pin (m) | M8 4-pin (m) | M8 4-pin (m) | M8 4-pin (m) | M8 4-pin (m) | M8 4-pin (m) | M8 4-pin (m) | M8 4-pin (m) | M8 4-pin (m) | M8 4-pin (m) | M8 4-pin (m) | M8 4-pin (m) | |||||||
| Recommended controllers / drivers | C-863 C-884 | C-863 C-884 | C-863 C-884 | C-863 C-884 | C-863 C-884 | C-863 C-884 | C-863 C-884 | C-863 C-884 | C-863 C-884 | C-863 C-884 | C-863 C-884 | C-863 C-884 | C-863 C-884 | C-863 C-884 | C-863 C-884 | C-863 C-884 | C-863 C-884 | C-863 C-884 | |
| Operating temperature range | 10 to 50 °C | 10 to 50 °C | -20 to +65 °C | -20 to +65 °C | -20 to +65 °C | -20 to +65 °C | 10 to 50 °C | 10 to 50 °C | -20 to +65 °C | -20 to +65 °C | -20 to +65 °C | -20 to +65 °C | 10 to 50 °C | 10 to 50 °C | -20 to +65 °C | -20 to +65 °C | -20 to +65 °C | -20 to +65 °C |
Note on pitch, yaw, straightness, flatness: Specified value applies per 100 mm
Note on gear ratio: (28/12)4 ~ 29.6 : 1
Downloads
Product Note
Product Note
Product Change Notification M-Portfolio-Streamlining Part-3
M-313.80, M-331.1MS, M-332.5MS, M-333.1MS, M-333.2MS, M-403.1VG, M-403.1VP, M-403.2VG, M-403.2VP, M-403.4VG, M-403.4VP, M-403.6VG, M-403.6VP, M-403.8VG, M-403.8VP, M-413.1VG, M-413.1VP, M-413.2VG, M-413.2VP, M-413.3VG, M-413.3VP, M-414.1VG, M-414.1VP, M-414.2VG, M-414.2VP, M-414.3VG, M-414.3VP, M-414.500, M-451.01, M-451.12S, M-451.1DG, M-451.1PD, M-500.18V, M-500.90, M-505.4DG, M-511.2S1, M-521.2S1, M-531.2S1, M-605.11, M-619.00, M-620.00, M-621.00, M-622.00, M-623.00, M-624.10, M-642.00, M-653.00, M-655.00
Version / Date
2019-08-13
pdf - 381 KB
English
Datasheet
Documentation
Documentation
User Manual MP113
M-511, M-521, M-531 Micropositioning Stages
Version / Date
1.2 2021-10-04
pdf - 2 MB
Version / Date
1.2 2021-10-04
pdf - 2 MB
3-D Models
3-D Models
M-511 3-D model
zip - 4 MB
3-D Models
M-521 3-D model
zip - 3 MB
3-D Models
M-531 3-D model
zip - 4 MB
Separate connection cable required for motor and sensor connection respectively.
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
M-511.DD2
High-precision linear stage; DC motor with ActiveDrive; 102 mm travel range; 1000 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 50 nm sensor resolution, A/B quadrature, RS-422; electromagnetic safety brake
M-511.DG1
High-precision linear stage; DC gear motor; 102 mm travel range; 1000 N load capacity; 6 mm/s maximum velocity; ball screw; incremental rotary encoder, 2048 counts/rev sensor resolution, A/B quadrature, RS-422
M-511.EC
High-precision linear stage; brushless DC motor; 102 mm travel range; 1000 N load capacity; 100 mm/s maximum velocity; ball screw; incremental rotary encoder, 4096 counts/rev sensor resolution, A/B quadrature, RS-422
M-511.PD1
High-precision linear stage; DC motor with ActiveDrive; 102 mm travel range; 1000 N load capacity; 100 mm/s maximum velocity; ball screw; incremental rotary encoder, 4096 counts/rev sensor resolution, A/B quadrature, RS-422
M-511.PG1
High-precision linear stage; DC gear motor with ActiveDrive; 102 mm travel range; 1000 N load capacity; 6 mm/s maximum velocity; ball screw; incremental rotary encoder, 2048 counts/rev sensor resolution, A/B quadrature, RS-422
M-521.DD1
High-precision linear stage; DC motor with ActiveDrive; 204 mm travel range; 1000 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 50 nm sensor resolution, A/B quadrature, RS-422
M-521.DD2
High-precision linear stage; DC motor with ActiveDrive; 204 mm travel range; 1000 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 50 nm sensor resolution, A/B quadrature, RS-422; electromagnetic safety brake
M-521.DG1
High-precision linear stage; DC gear motor; 204 mm travel range; 1000 N load capacity; 6 mm/s maximum velocity; ball screw; incremental rotary encoder, 2048 counts/rev sensor resolution, A/B quadrature, RS-422
M-521.EC
High-precision linear stage; brushless DC motor; 204 mm travel range; 1000 N load capacity; 100 mm/s maximum velocity; ball screw; incremental rotary encoder, 4096 counts/rev sensor resolution, A/B quadrature, RS-422
M-521.PD1
High-precision linear stage; DC motor with ActiveDrive; 204 mm travel range; 1000 N load capacity; 100 mm/s maximum velocity; ball screw; incremental rotary encoder, 4096 counts/rev sensor resolution, A/B quadrature, RS-422
M-521.PG1
High-precision linear stage; DC gear motor with ActiveDrive; 204 mm travel range; 1000 N load capacity; 6 mm/s maximum velocity; ball screw; incremental rotary encoder, 2048 counts/rev sensor resolution, A/B quadrature, RS-422
M-531.DD1
High-precision linear stage; DC motor with ActiveDrive; 306 mm travel range; 1000 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 50 nm sensor resolution, A/B quadrature, RS-422
M-531.DD2
High-precision linear stage; DC motor with ActiveDrive; 306 mm travel range; 1000 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 50 nm sensor resolution, A/B quadrature, RS-422; electromagnetic safety brake
M-531.DG1
High-precision linear stage; DC gear motor; 306 mm travel range; 1000 N load capacity; 6 mm/s maximum velocity; ball screw; incremental rotary encoder, 2048 counts/rev sensor resolution, A/B quadrature, RS-422
M-531.EC
High-precision linear stage; brushless DC motor; 306 mm travel range; 1000 N load capacity; 100 mm/s maximum velocity; ball screw; incremental rotary encoder, 4096 counts/rev sensor resolution, A/B quadrature, RS-422
M-531.PD1
High-precision linear stage; DC motor with ActiveDrive; 306 mm travel range; 1000 N load capacity; 100 mm/s maximum velocity; ball screw; incremental rotary encoder, 4096 counts/rev sensor resolution, A/B quadrature, RS-422
M-531.PG1
High-precision linear stage; DC gear motor with ActiveDrive; 306 mm travel range; 1000 N load capacity; 6 mm/s maximum velocity; ball screw; incremental rotary encoder, 2048 counts/rev sensor resolution, A/B quadrature, RS-422
