Precision linear stage, 13 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 80 × 20 mm (W × L × H), NEXACT® piezoelectric walking drive
- Ultraprecision: 3 nm minimum incremental motion and direct-measuring PIOne encoder with 0.5 nm resolution
- Long travel ranges: 13 mm, 26 mm or 52 mm
- Self-locking when switched off: Saves energy and reduces generation of heat
- Long lifetime and high reliability due to PiezoWalk® technology
- Compact design: 65 mm width, 20 mm height
NEXACT® reference-class linear stage
Linear stage with NEXACT® PiezoWalk® drives allow high-precision positioning in the nanometer range over long travel ranges. They are equipped with direct-measuring linear encoders and crossed roller bearings for the highest accuracy.
PiezoWalk® technology: High resolution and low wear
The PiezoWalk® technology combines the technological advantages of piezo actuators with those of piezomotors. PiezoWalk® walking drives offer not only subnanometer resolution, high forces, and high stiffness but allow theoretically unlimited travel ranges. In contrast to other piezo-motorized drive principles, PiezoWalk® walking drives are not subject to sliding friction effects. They are based on stiction contacts of several piezo actuators that step along a runner. At rest, PiezoWalk® walking drives are self-locking, consume no energy, and do not generate heat.
Direct position measuring with PIOne linear encoder
The high-resolution PIOne encoder was developed by PI and, with corresponding processing of the measured value, allows a position resolution of much less than one nanometer. In addition, due to the short signal period and the high quality of the signals, the linearity error of PIOne encoders is less than 1 %. PIOne encoders support direction sensing when evaluating a reference signal.
Sample manipulation, sample positioning, optics or mechanical components with high precision and stability, precision mechanics in the semiconductor industry, micromanipulation, microscopy, automation, applications in confined spaces, applications in nonmagnetic environments.
Product Change Notification Motor Driven Products
User Manual MP148
N-565 NEXACT® Linear Stage
Short Instructions MP137EK
NEXACT® Positioners: N-524, N-565, N-765
N-565 3-D model
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Precision linear stage, 26 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 110 × 20 mm (W × L × H), NEXACT® piezoelectric walking drive
Precision linear stage, 52 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 160 × 20 mm (W × L × H), NEXACT® piezoelectric walking drive