S-330 Fast Piezo Tip/Tilt Platform

Dynamic, with Large Deflection Angles, for Mirrors and Optics

S-330 Fast Piezo Tip/Tilt Platform

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S-330.xSL with cable splitter box; dimensions in mm.

System frequency response with different E-727 controllers and mirror sizes: S-330.2SH

System frequency response with different E-727 controllers and mirror sizes: S-330.8SH

Tip/tilt angle to 10 mrad, optical deflection angle to 20 mrad (>1°)
High resonant frequencies to 1.6 kHz(1" mirror) for dynamic motion and fast step-and-settle
Resolution to 20 nrad
Excellent position stability
Sub-ms response time
For mirrors with a diameter up to 50 mm

Image processing / stabilization
Optical trapping
Laser scanning / beam steering
Laser tuning
Optical filters / switches
Optics
Beam stabilization

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.

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Datasheet

Datasheet S-330

Version / Date

2020-10-12

Version / Date

2020-10-12

Version / Date

2021-01-26

Version / Date

2018-07-19

Document language

pdf - 428 KB

pdf - 433 KB

pdf - 595 KB

pdf - 891 KB

	S-330.2SH / S-330.2SL	S-330.4SH / S-330.4SL	S-330.8SH / S-330.8SL	Unit	Tolerance
Active axes	θ_X, θ_Y	θ_X, θ_Y	θ_X, θ_Y
Motion and positioning
Integrated sensor *	SGS	SGS	SGS
Tip/tilt angle in θ_X, θ_Y at -20 to 120 V, open loop	3.5	7	15	mrad	Min.
Tip/tilt angle in θ_X, θ_Y, closed loop	2	5	10	mrad
Resolution in θ_X, θ_Y, open loop	0.02	0.1	0.2	µrad	Typ.
Resolution in θ_X, θ_Y, closed loop	0.05	0.25	0.5	µrad	Typ.
Linearity error in θ_X, θ_Y	0.05 **	0.1 **	0.1 **	%	Typ.
Repeatability in θ_X, θ_Y, 10 % tip/tilt angle	0.06 **	0.08 **	0.15 **	µrad	Typ.
Repeatability in θ_X, θ_Y, 100 % tip/tilt angle	0.6 **	0.8 **	1.5 **	µrad	Typ.
Mechanical properties
Resonant frequency, unloaded, in θ_X, θ_Y	2.4	2.0	1.0	kHz	±20 %
Resonant frequency, under load, in θ_X, θ_Y (with glass mirror, Ø 25 mm, thickness 8 mm)	1.6	1.5	1.0	kHz	±20 %
Distance pivot point to platform surface	6.5	6.5	6.5	mm	±1 mm
Platform moment of inertia	1530	1530	1530	g × mm²	±20 %
Drive properties
Ceramic type	PICMA®	PICMA®	PICMA®
Electrical capacitance	3 / axis	6 / axis	12.5 / axis	µF	±20 %
Miscellaneous
Operating temperature range	-20 to 80	-20 to 80	-20 to 80	°C
Housing material	Steel	Steel	Steel
Platform material	Invar	Invar	Invar
Mass	0.2	0.38	0.7	kg	±5 %
Cable length	2	2	2	m	+100 mm / -0 mm
Sensor/voltage connector	SH version: D-sub 37 (m) SL version: LEMO	SH version: D-sub 37 (m) SL version: LEMO	SH version: D-sub 37 (m) SL version: LEMO
Recommended electronics	E-509.S3 + E-505.00 (2×) + E-505.00S + E-500.00, E-727	E-509.S3 + E-505.00 (2×) + E-505.00S + E-500.00, E-727	E-509.S3 + E-505.00 (2×) + E-505.00S + E-500.00, E-727

* Models without sensor are available on request.

** S-330.xSH in conjunction with digital controllers.

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

Download datasheet Go to download

Datasheet

Datasheet S-330

Version / Date

2020-10-12

Version / Date

2020-10-12

Version / Date

2021-01-26

Version / Date

2018-07-19

Document language

pdf - 428 KB

pdf - 433 KB

pdf - 595 KB

pdf - 891 KB

Documentation

Short Instructions PZ277

Piezo Tip/Tilt Platforms: S-3xx

Version / Date

1.2.0 03/2020

Version / Date

1.2.0 03/2020

Document language

Download

pdf - 1 MB

Download

pdf - 1 MB

Documentation

User Manual PZ270

S-330.xSH and S-330.xSL High-Dynamics Tip/Tilt Platforms

Version / Date

1.1.1 2020-10-12

Version / Date

1.1.1 2020-10-12

Document language

Request download link

Documentation

User Manual PZ149

S-330.xSD High-Dynamics Piezo Tip / Tilt Platforms

Version / Date

2007-07-24

Document language English

Request download link

3-D Models

3-D-model S-330.4Sx

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3-D Models

3-D-model S-330.2Sx

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3-D Models

3-D-model S-330.8Sx

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White Paper

Piezo Tip/Tilt Systems

Design – Performance – Tuning

Version / Date

WP4012E 2018-10

Version / Date

WP4012D 2018-10

Document language

Download

pdf - 1,018 KB

Download

pdf - 919 KB

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S-330.2SL

High-dynamics tip/tilt platform, 2 mrad tip/tilt angle, strain gauge sensors, LEMO connectors

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S-330.2SH

High-dynamics tip/tilt platform, 2 mrad tip/tilt angle, strain gauge sensors, D-sub 37 connector (m)

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S-330.4SL

High-dynamics tip/tilt platform, 5 mrad tip/tilt angle, strain gauge sensors, LEMO connectors

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S-330.4SH

High-dynamics tip/tilt platform, 5 mrad tip/tilt angle, strain gauge sensors, D-sub 37 connector (m)

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