S-330 Fast Piezo Tip/Tilt Platform
Dynamic, with Large Deflection Angles, for Mirrors and Optics
- Tip/tilt angle to 10 mrad, optical deflection angle to 20 mrad (>1°)
- High resonant frequencies to 1.6 kHz(1" mirror) for dynamic motion and fast step-and-settle
- Resolution to 20 nrad
- Excellent position stability
- Sub-ms response time
- For mirrors with a diameter up to 50 mm
Application fields
- Image processing / stabilization
- Optical trapping
- Laser scanning / beam steering
- Laser tuning
- Optical filters / switches
- Optics
- Beam stabilization
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
High dynamics multi-axis operation due to parallel kinematics
In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.
Specifications
Specifications
S-330.2SH / S-330.2SL | S-330.4SH / S-330.4SL | S-330.8SH / S-330.8SL | Unit | Tolerance | |
---|---|---|---|---|---|
Active axes | θX, θY | θX, θY | θX, θY | ||
Motion and positioning | |||||
Integrated sensor * | SGS | SGS | SGS | ||
Tip/tilt angle in θX, θY at -20 to 120 V, open loop | 3.5 | 7 | 15 | mrad | Min. |
Tip/tilt angle in θX, θY, closed loop | 2 | 5 | 10 | mrad | |
Resolution in θX, θY, open loop | 0.02 | 0.1 | 0.2 | µrad | Typ. |
Resolution in θX, θY, closed loop | 0.05 | 0.25 | 0.5 | µrad | Typ. |
Linearity error in θX, θY | 0.05 ** | 0.1 ** | 0.1 ** | % | Typ. |
Repeatability in θX, θY, 10 % tip/tilt angle | 0.06 ** | 0.08 ** | 0.15 ** | µrad | Typ. |
Repeatability in θX, θY, 100 % tip/tilt angle | 0.6 ** | 0.8 ** | 1.5 ** | µrad | Typ. |
Mechanical properties | |||||
Resonant frequency, unloaded, in θX, θY | 2.4 | 2.0 | 1.0 | kHz | ±20 % |
Resonant frequency, under load, in θX, θY (with glass mirror, Ø 25 mm, thickness 8 mm) | 1.6 | 1.5 | 1.0 | kHz | ±20 % |
Distance pivot point to platform surface | 6.5 | 6.5 | 6.5 | mm | ±1 mm |
Platform moment of inertia | 1530 | 1530 | 1530 | g × mm² | ±20 % |
Drive properties | |||||
Ceramic type | PICMA® | PICMA® | PICMA® | ||
Electrical capacitance | 3 / axis | 6 / axis | 12.5 / axis | µF | ±20 % |
Miscellaneous | |||||
Operating temperature range | -20 to 80 | -20 to 80 | -20 to 80 | °C | |
Housing material | Steel | Steel | Steel | ||
Platform material | Invar | Invar | Invar | ||
Mass | 0.2 | 0.38 | 0.7 | kg | ±5 % |
Cable length | 2 | 2 | 2 | m | +100 mm / -0 mm |
Sensor/voltage connector | SH version: D-sub 37 (m) SL version: LEMO | SH version: D-sub 37 (m) SL version: LEMO | SH version: D-sub 37 (m) SL version: LEMO | ||
Recommended electronics | E-509.S3 + E-505.00 (2×) + E-505.00S + E-500.00, E-727 | E-509.S3 + E-505.00 (2×) + E-505.00S + E-500.00, E-727 | E-509.S3 + E-505.00 (2×) + E-505.00S + E-500.00, E-727 |
Downloads
Product Note
Product Change Notification Piezo Actuator Driven Products
Datasheet
Documentation
User Manual PZ270
S-330.xSH and S-330.xSL High-Dynamics Tip/Tilt Platforms
User Manual PZ149
S-330.xSD High-Dynamics Piezo Tip / Tilt Platforms
3-D Models
3-D-model S-330.4Sx
3-D-model S-330.2Sx
3-D-model S-330.8Sx
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
Ask an engineer!
Quickly receive an answer to your question by email or phone from a local PI sales engineer.
Technology

PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.

Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.

Parallel Kinematics
In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.