P-612.Z Piezo Z Stage

Compact Nanopositioner with Aperture

P-612.Z Piezo Z Stage

Product Description Specifications Downloads Quote / Order

With active control, the settling time is less than 10 ms over the entire travel range.

Travel range 100 µm
Resolution to 0.2 nm
Linearity error 0.2 %
Compact: Surface 60 mm × 60 mm
Particularly inexpensive systems (mechanics and controller)
Zero-play, high-precision flexure guide system
Outstanding lifetime due to PICMA® piezo actuators

Interferometry
Microscopy
Nanopositioning
Biotechnology
Test procedures and quality assurance
Semiconductor technology

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

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Datasheet

Datasheet P-612.Z

Version / Date

2018-05-08

Version / Date

2018-05-08

Version / Date

2018-06-14

Version / Date

2018-07-12

Document language

pdf - 562 KB

pdf - 567 KB

pdf - 778 KB

pdf - 858 KB

	P-612.ZSL	P-612.Z0L	Unit	Tolerance
Active axes	Z	Z
Motion and positioning
Integrated sensor	SGS	-
Travel range at -20 to +120 V, open loop	110	110	µm	+20 % / -0 %
Travel range, closed loop	100	-	µm
Resolution, open loop	0.2	0.2	nm	typ.
Resolution, closed loop	1.5	-	nm	typ.
Linearity error, closed loop	0.2	-	%	typ.
Repeatability	±4	-	nm	typ.
Tilt θ_X, θ_Y	±10	±10	µrad	typ.
Crosstalk in X, Y	±20	±20	nm	typ.
Mechanical properties
Stiffness in motion direction	0.63	0.63	N/µm	±20 %
Resonant frequency, no load	490	490	Hz	±20 %
Resonant frequency, under load, 30 g	420	420	Hz	±20 %
Load capacity	15 / 10	15 / 10	N	max.
Drive properties
Ceramic type	PICMA® P-885	PICMA® P-885
Electrical capacitance	3	3	µF	±20 %
Miscellaneous
Operating temperature range	-20 to 80	-20 to 80	°C
Material	Aluminum	Aluminum
Mass	0.28	0.275	kg	±5 %
Cable length	1.5	1.5	m	±10 mm
Voltage connection	LEMO	LEMO
Sensor connection	LEMO	-
Recommended electronics	E-610, E-621, E-625, E-665	E-610, E-621, E-625, E-665

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

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Product Note

Product Change Notification Piezo Actuator Driven Products

Version / Date

2021-04-19

Document language English

Download

pdf - 377 KB

Datasheet

Datasheet P-612.Z

Version / Date

2018-05-08

Version / Date

2018-05-08

Version / Date

2018-06-14

Version / Date

2018-07-12

Document language

pdf - 562 KB

pdf - 567 KB

pdf - 778 KB

pdf - 858 KB

Documentation

User Manual PZ280

P-612 XY Nanopositioning Systems and Vertical Nanopositioning Stages

Version / Date

1.0.0 2017-04-27

Version / Date

1.0.0 2017-04-27

Document language

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Documentation

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Version / Date

6.1.0 10/2019

Version / Date

6.1.0 10/2019

Document language

Download

pdf - 1 MB

Download

pdf - 1 MB

3-D Models

3-D-model P-612.xxL

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P-612.Z0L

Vertical nanopositioning stage, 110 µm, aperture 20 mm × 20 mm, open loop

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P-612.ZSL

Vertical nanopositioning stage, 100 µm, aperture 20 mm × 20 mm, strain gauge sensor

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