P-612.Z Piezo Z Stage

Compact Nanopositioner with Aperture

Travel range 100 µm
Resolution to 0.2 nm
Linearity error 0.2 %
Compact: Surface 60 mm × 60 mm
Particularly inexpensive systems (mechanics and controller)
Zero-play, high-precision flexure guide system
Outstanding lifetime due to PICMA® piezo actuators

P-612.Z, dimensions in mm

With active control, the settling time is less than 10 ms over the entire travel range.

Interferometry
Microscopy
Nanopositioning
Biotechnology
Test procedures and quality assurance
Semiconductor technology

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Download datasheet specifications

Datasheet

Version / Date

2018-05-08

pdf - 562 KB

Version / Date

2018-05-08

pdf - 567 KB

Version / Date

2018-06-14

pdf - 778 KB

Version / Date

2018-07-12

pdf - 858 KB

Download

	P-612.ZSL	P-612.Z0L	Unit	Tolerance
Active axes	Z	Z
Motion and positioning
Integrated sensor	SGS	-
Travel range at -20 to +120 V, open loop	110	110	µm	+20 % / -0 %
Travel range, closed loop	100	-	µm
Resolution, open loop	0.2	0.2	nm	typ.
Resolution, closed loop	1.5	-	nm	typ.
Linearity error, closed loop	0.2	-	%	typ.
Repeatability	±4	-	nm	typ.
Tilt θ_X, θ_Y	±10	±10	µrad	typ.
Crosstalk in X, Y	±20	±20	nm	typ.
Mechanical properties
Stiffness in motion direction	0.63	0.63	N/µm	±20 %
Resonant frequency, no load	490	490	Hz	±20 %
Resonant frequency, under load, 30 g	420	420	Hz	±20 %
Load capacity	15 / 10	15 / 10	N	max.
Drive properties
Ceramic type	PICMA® P-885	PICMA® P-885
Electrical capacitance	3	3	µF	±20 %
Miscellaneous
Operating temperature range	-20 to 80	-20 to 80	°C
Material	Aluminum	Aluminum
Mass	0.28	0.275	kg	±5 %
Cable length	1.5	1.5	m	±10 mm
Voltage connection	LEMO	LEMO
Sensor connection	LEMO	-
Recommended electronics	E-610, E-621, E-625, E-665	E-610, E-621, E-625, E-665

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

Download datasheet downloads

Product Note

Version / Date

2021-04-19

pdf - 377 KB

English

Download

Datasheet

Version / Date

2018-05-08

pdf - 562 KB

Version / Date

2018-05-08

pdf - 567 KB

Version / Date

2018-06-14

pdf - 778 KB

Version / Date

2018-07-12

pdf - 858 KB

Download

Documentation

P-612 XY Nanopositioning Systems and Vertical Nanopositioning Stages

Version / Date

1.0.0 2017-04-27

pdf - 2 MB

Version / Date

1.0.0 2017-04-27

pdf - 2 MB

Documentation

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Version / Date

6.1.0 10/2019

pdf - 1 MB

Version / Date

6.1.0 10/2019

pdf - 1 MB

Download

3-D Models

zip - 179 KB

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P-612.Z0L

Vertical nanopositioning stage, 110 µm, aperture 20 mm × 20 mm, open loop

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P-612.ZSL

Vertical nanopositioning stage, 100 µm, aperture 20 mm × 20 mm, strain gauge sensor

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