P-612.Z Piezo Z Stage
Compact Nanopositioner with Aperture
- Travel range 100 µm
- Resolution to 0.2 nm
- Linearity error 0.2 %
- Compact: Surface 60 mm × 60 mm
- Particularly inexpensive systems (mechanics and controller)
- Zero-play, high-precision flexure guide system
- Outstanding lifetime due to PICMA® piezo actuators
Application fields
- Interferometry
- Microscopy
- Nanopositioning
- Biotechnology
- Test procedures and quality assurance
- Semiconductor technology
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Specifications
Specifications
P-612.ZSL | P-612.Z0L | Unit | Tolerance | |
---|---|---|---|---|
Active axes | Z | Z | ||
Motion and positioning | ||||
Integrated sensor | SGS | - | ||
Travel range at -20 to +120 V, open loop | 110 | 110 | µm | +20 % / -0 % |
Travel range, closed loop | 100 | - | µm | |
Resolution, open loop | 0.2 | 0.2 | nm | typ. |
Resolution, closed loop | 1.5 | - | nm | typ. |
Linearity error, closed loop | 0.2 | - | % | typ. |
Repeatability | ±4 | - | nm | typ. |
Tilt θX, θY | ±10 | ±10 | µrad | typ. |
Crosstalk in X, Y | ±20 | ±20 | nm | typ. |
Mechanical properties | ||||
Stiffness in motion direction | 0.63 | 0.63 | N/µm | ±20 % |
Resonant frequency, no load | 490 | 490 | Hz | ±20 % |
Resonant frequency, under load, 30 g | 420 | 420 | Hz | ±20 % |
Load capacity | 15 / 10 | 15 / 10 | N | max. |
Drive properties | ||||
Ceramic type | PICMA® P-885 | PICMA® P-885 | ||
Electrical capacitance | 3 | 3 | µF | ±20 % |
Miscellaneous | ||||
Operating temperature range | -20 to 80 | -20 to 80 | °C | |
Material | Aluminum | Aluminum | ||
Mass | 0.28 | 0.275 | kg | ±5 % |
Cable length | 1.5 | 1.5 | m | ±10 mm |
Voltage connection | LEMO | LEMO | ||
Sensor connection | LEMO | - | ||
Recommended electronics | E-610, E-621, E-625, E-665 | E-610, E-621, E-625, E-665 |
Downloads
Product Note
Product Change Notification Piezo Actuator Driven Products
Datasheet
Documentation
User Manual PZ280
P-612 XY Nanopositioning Systems and Vertical Nanopositioning Stages
3-D Models
3-D-model P-612.xxL
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Technology

PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.

Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.