N-381 NEXACT® Linear Actuator, Manipulator, Piezo Stepper

High Resolution with Optional Position Sensor

Travel range 30 mm
Force generation to 10 N
With NEXACT® piezo walking drive
Optional: Integrated linear encoder with 20 nm resolution

N-381, dimensions in mm

Industrial precision positioning
Semiconductor technology
Semiconductor tests
Wafer inspection
Lithography
Nanoimprinting
Nanometrology
Motion in strong magnetic fields and in a vacuum

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Download datasheet Go to specifications

Datasheet

Version / Date

2019-01-21

pdf - 332 KB

Version / Date

2019-01-21

pdf - 345 KB

Version / Date

2019-01-22

pdf - 654 KB

Download

	N-381.30	N-381.3A
Active axes	X	X
Motion and positioning
Travel range	30 mm	30 mm
Integrated sensor	-	Incremental linear encoder
Sensor resolution	-	20 nm*
Travel range in analog mode, open loop	±5 µm (max.)	±5 µm (max.)
Resolution, open loop	0.03 nm**	0.03 nm**
Resolution, closed loop	-	20 nm*
Max. velocity	10 mm/s*	10 mm/s*
Mechanical properties
Max. push/pull force (active)	10 N	10 N
Max. holding force (passive)	15 N	15 N
Permissible lateral force	10 N (max.)	10 N (max.)
Drive properties
Drive type	NEXACT® linear drive	NEXACT® linear drive
Operating voltage	-10 V to +45 V	-10 V to +45 V
Miscellaneous
Operating temperature range	0 to 50 °C	0 to 50 °C
Material	Chromium steel / CFK	Chromium steel / CFK
Mass	250 g	255 g
Cable length	1.5 m	1.5 m
Motor connection	HD D-sub (m) 15	HD D-sub 15 (m)
Sensor connection	-	HD D-sub 15 (f)
Recommended electronics	E-712, E-861, E-861.11C885, E-862	E-712, E-861, E-861.11C885, E-862

* With E-861. Depending on drive electronics.

** 1 nm with E-861. Depending on drive electronics.

All specifications based on room temperature (22 °C ±3 °C).

Download datasheet Go to download

Datasheet

Version / Date

2019-01-21

pdf - 332 KB

Version / Date

2019-01-21

pdf - 345 KB

Version / Date

2019-01-22

pdf - 654 KB

Download

Documentation

N-381.30 NEXACT® linear actuator

Version / Date

2018-11-21

pdf - 2 MB

Version / Date

2018-11-21

pdf - 2 MB

Documentation

N-381.3A NEXACT® linear actuator

Version / Date

2018-11-21

pdf - 2 MB

Version / Date

2018-11-21

pdf - 2 MB

3-D Models

zip - 202 KB

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N-381.30

NEXACTUATOR linear actuator, 30 mm, open loop

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N-381.3A

NEXACTUATOR linear actuator, 30 mm, 20 nm encoder resolution

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