N-381 NEXACT® Linear Actuator, Manipulator, Piezo Stepper
High Resolution with Optional Position Sensor
- Travel range 30 mm
- Force generation to 10 N
- With NEXACT® piezo walking drive
- Optional: Integrated linear encoder with 20 nm resolution
Application fields
- Industrial precision positioning
- Semiconductor technology
- Semiconductor tests
- Wafer inspection
- Lithography
- Nanoimprinting
- Nanometrology
- Motion in strong magnetic fields and in a vacuum
Nanometer precision and high feed force with PiezoWalk® walking drives
Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.
Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Specifications
Specifications
N-381.30 | N-381.3A | |
---|---|---|
Active axes | X | X |
Motion and positioning | ||
Travel range | 30 mm | 30 mm |
Integrated sensor | - | Incremental linear encoder |
Sensor resolution | - | 20 nm* |
Travel range in analog mode, open loop | ±5 µm (max.) | ±5 µm (max.) |
Resolution, open loop | 0.03 nm** | 0.03 nm** |
Resolution, closed loop | - | 20 nm* |
Max. velocity | 10 mm/s* | 10 mm/s* |
Mechanical properties | ||
Max. push/pull force (active) | 10 N | 10 N |
Max. holding force (passive) | 15 N | 15 N |
Permissible lateral force | 10 N (max.) | 10 N (max.) |
Drive properties | ||
Drive type | NEXACT® linear drive | NEXACT® linear drive |
Operating voltage | -10 V to +45 V | -10 V to +45 V |
Miscellaneous | ||
Operating temperature range | 0 to 50 °C | 0 to 50 °C |
Material | Chromium steel / CFK | Chromium steel / CFK |
Mass | 250 g | 255 g |
Cable length | 1.5 m | 1.5 m |
Motor connection | HD D-sub (m) 15 | HD D-sub 15 (m) |
Sensor connection | - | HD D-sub 15 (f) |
Recommended electronics | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 |
Downloads
Datasheet
Documentation
User Manual MP108
N-381.30 NEXACT® linear actuator
User Manual MP177
N-381.3A NEXACT® linear actuator
3-D Models
N-381 3-D model
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Technology

PiezoWalk® Walking Drives
PiezoWalk® drives were developed more than 10 years ago for the semiconductor industry, a demanding industry when it comes to reliability, position resolution and long-term stability.

Incremental Sensors
PI uses incremental measurement systems for longer travel ranges, starting from approximately one millimeter. These sensors, which in most cases are optical sensors, achieve position resolution down to the picometer range.