P-734 XY Piezo Scanner
High-Dynamics System with Minimum Runout and Clear Aperture
- Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
- Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
- Travel range 100 µm × 100 µm
- Clear aperture 56 mm × 56 mm
- Capacitive sensors for resolution <0.4 nm
- Outstanding lifetime due to PICMA® piezo actuators
Specifications
Specifications
P-734.2CL | P-734.2CD | Unit | Tolerance | |
---|---|---|---|---|
Active axes | X, Y | X, Y | ||
Motion and positioning | ||||
Integrated sensor | Capacitive | Capacitive | ||
Open-loop travel, -20 to 120 V | 110 µm × 110 µm | 110 µm × 110 µm | min. (+20 %/-0 %) | |
Closed-loop travel | 100 µm × 100 µm | 100 µm × 100 µm | ||
Open-loop resolution | 0.2 | 0.2 | nm | typ. |
Closed-loop resolution | 0.3 | 0.3 | nm | typ. |
Linearity error | 0.03 | 0.03 | % | typ. |
Repeatability | <2.5 | <2.5 | nm | typ. |
Pitch | <3 | <3 | µrad | typ. |
Yaw | <10 | <10 | µrad | typ. |
Flatness | typ. <5max. 10 | typ. <5max. 10 | nm | |
Mechanical properties | ||||
Stiffness | 3 | 3 | N/µm | ±20 % |
Resonant frequency, no load | 500 | 500 | Hz | ±20 % |
Resonant frequency at 200 g | 350 | 350 | Hz | ±20 % |
Resonant frequency at 500 g | 250 | 250 | Hz | ±20 % |
Push / pull force capacity in motion direction | 300 / 100 | 300 / 100 | N | max. |
Load capacity | 20 | 20 | N | max. |
Drive properties | ||||
Ceramic type | PICMA® P-885 | PICMA® P-885 | ||
Electrical capacitance | 6.2 | 6.2 | µF | ±20 % |
Dynamic operating current coefficient | 7.8 | 7.8 | µA / (Hz × µm) | ±20 % |
Miscellaneous | ||||
Operating temperature range | -20 to 80 | -20 to 80 | °C | |
Material | Aluminum | Aluminum | ||
Mass (with cables) | 1.04 | 1.04 | kg | ±5 % |
Cable length | 1.5 | 1.5 | m | ±10 mm |
Sensor connection | 2 × LEMO | Sub-D Special | ||
Voltage connection | 4 × LEMO | Sub-D Special |
Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 10 µm at 10 Hz requires approximately 7.8 mA drive current.
Recommended controller / amplifier
P-734.2CL: E-500 modular piezo controller system with E-503 amplifier module (multi-channel) or E-505 (1 per axis, high performance) and E-509 controller
P-734.2CD: Multi-channel digital controllers: E-710 / E-725 bench-top, E-712 modular, E-725 high-power, E-761 PCI board
Downloads
Product Note
Product Change Notification Piezo Actuator Driven Products
Datasheet
Documentation
User Manual PZ103
P-733, P-734 Piezo Nanopositioning Systems with Capacitive Sensors
3-D Models
P-734 3-D model
Quote / Order
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