P-734 XY Piezo Scanner

High-Dynamics System with Minimum Runout and Clear Aperture

Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
Travel range 100 µm × 100 µm
Clear aperture 56 mm × 56 mm
Capacitive sensors for resolution <0.4 nm
Outstanding lifetime due to PICMA® piezo actuators

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Datasheet

Version / Date

2015-01-30

pdf - 810 KB

Version / Date

2015-01-30

pdf - 804 KB

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	P-734.2CL	P-734.2CD	Unit	Tolerance
Active axes	X, Y	X, Y
Motion and positioning
Integrated sensor	Capacitive	Capacitive
Open-loop travel, -20 to 120 V	110 µm × 110 µm	110 µm × 110 µm		min. (+20 %/-0 %)
Closed-loop travel	100 µm × 100 µm	100 µm × 100 µm
Open-loop resolution	0.2	0.2	nm	typ.
Closed-loop resolution	0.3	0.3	nm	typ.
Linearity error	0.03	0.03	%	typ.
Repeatability	<2.5	<2.5	nm	typ.
Pitch	<3	<3	µrad	typ.
Yaw	<10	<10	µrad	typ.
Flatness	typ. <5max. 10	typ. <5max. 10	nm
Mechanical properties
Stiffness	3	3	N/µm	±20 %
Resonant frequency, no load	500	500	Hz	±20 %
Resonant frequency at 200 g	350	350	Hz	±20 %
Resonant frequency at 500 g	250	250	Hz	±20 %
Push / pull force capacity in motion direction	300 / 100	300 / 100	N	max.
Load capacity	20	20	N	max.
Drive properties
Ceramic type	PICMA® P-885	PICMA® P-885
Electrical capacitance	6.2	6.2	µF	±20 %
Dynamic operating current coefficient	7.8	7.8	µA / (Hz × µm)	±20 %
Miscellaneous
Operating temperature range	-20 to 80	-20 to 80	°C
Material	Aluminum	Aluminum
Mass (with cables)	1.04	1.04	kg	±5 %
Cable length	1.5	1.5	m	±10 mm
Sensor connection	2 × LEMO	Sub-D Special
Voltage connection	4 × LEMO	Sub-D Special

Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 10 µm at 10 Hz requires approximately 7.8 mA drive current.

P-734.2CL: E-500 modular piezo controller system with E-503 amplifier module (multi-channel) or E-505 (1 per axis, high performance) and E-509 controller

P-734.2CD: Multi-channel digital controllers: E-710 / E-725 bench-top, E-712 modular, E-725 high-power, E-761 PCI board

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Product Note

Version / Date

2021-04-19

pdf - 377 KB

English

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Datasheet

Version / Date

2015-01-30

pdf - 810 KB

Version / Date

2015-01-30

pdf - 804 KB

Download

Documentation

P-733, P-734 Piezo Nanopositioning Systems with Capacitive Sensors

Version / Date

1.1.0 2020-10-26

pdf - 2 MB

Version / Date

1.1.0 2020-10-26

pdf - 2 MB

3-D Models

zip - 1 MB

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P-734.2CD

High-Precision XY Nanopositioning System with Minimum Runout, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)

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P-734.2CL

High-Precision XY Nanopositioning System with Minimum Runout, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)

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