P-734 XY Piezo Scanner

Active axes

X, Y

X, Y

Integrated sensor

Capacitive

Capacitive

Open-loop travel, -20 to 120 V

110 µm × 110 µm

110 µm × 110 µm

min. (+20 %/-0 %)

Closed-loop travel

100 µm × 100 µm

100 µm × 100 µm

Open-loop resolution

0.2

0.2

nm

typ.

Closed-loop resolution

0.3

0.3

nm

typ.

Linearity error

0.03

0.03

%

typ.

Repeatability

2.5

2.5

nm

typ.

Pitch

3

3

µrad

typ.

Yaw

10

10

µrad

typ.

Flatness

typ. 5max. 10

typ. 5max. 10

nm

Stiffness

3

3

N/µm

±20 %

Resonant frequency, no load

500

500

Hz

±20 %

Resonant frequency at 200 g

350

350

Hz

±20 %

Resonant frequency at 500 g

250

250

Hz

±20 %

Push / pull force capacity in motion direction

300 / 100

300 / 100

N

max.

Load capacity

20

20

N

max.

Ceramic type

PICMA® P-885

PICMA® P-885

Electrical capacitance

6.2

6.2

µF

±20 %

Dynamic operating current coefficient

7.8

7.8

µA / (Hz × µm)

±20 %

Operating temperature range

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Mass (with cables)

1.04

1.04

kg

±5 %

Cable length

1.5

1.5

m

±10 mm

Sensor connection

2 × LEMO

Sub-D Special

Voltage connection

4 × LEMO

Sub-D Special