N-331 PICMAWalk Walking Drive

OEM Walking Drive for Durable Applications with up to 15 mm/s Velocity and up to 50 N Push/Pull Force

  • Robust walking drive for industrial use with ​P​I​C​M​A​® ​t​e​c​h​n​o​l​o​g​y for extreme durability
  • Fastest and strongest drive of its size class
  • Variable runner lengths from 25 mm to 100 mm
  • Precise, nanometer precision positioning of loads up to 5 kg
  • Plug-and-play, thanks to PI proprietary controller ​t​e​c​h​n​o​l​o​g​y
  • Vacuum versions to 10-9 hPa available
N-331 PICMAWalk Walking Drive
Product Description Specifications Downloads Quote / Order

Application fields

  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology

Outstanding lifetime due to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Nanometer precision and high feed force with PiezoWalk® walking drives

In the PiezoWalk® walking drive, several piezo actuators do a walking motion that leads to a forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Specifications

Datasheet

Datasheet N-331

Version / Date
2022-07-07
pdf - 796 KB
Version / Date
2022-07-07
pdf - 799 KB
Version / Date
2018-10-16
pdf - 791 KB

Downloads

Datasheet

Datasheet

Datasheet N-331

Version / Date
2022-07-07
pdf - 796 KB
Version / Date
2022-07-07
pdf - 799 KB
Version / Date
2018-10-16
pdf - 791 KB

Documentation

Documentation

User Manual PZ271

N-331 Piezoelectric Walking Drive PICMAWalk

Version / Date
1.1.3 2021-09-22
pdf - 2 MB
English

3-D Models

3-D Models

N-331 3-D model

N-331 3-D model

zip - 1 MB

White Paper

White Paper

Controlling PI Positioners with External Zygo Interferometers

Version / Date
WP4017E 2018-11
pdf - 637 KB
Version / Date
WP4017D 2018-11
pdf - 1 MB

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